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NanoCalc Series

/ Spectrometer systems

The spectroscopic reflectometry systems

The NanoCalc Series are part of the mikropack product line of thin film metrology systems. The NanoCalc systems are versatile and configurable thin film measurement systems utilising spectroscopic reflectometry to accurately determine optical and non-optical thin film thicknesses for consumer, semiconductor, medical and industrial applications in a wide range of fields. NanoCalc system measures anti-reflective coatings, anti-scratch coatings and rough layers on substrates such as steel, aluminum, brass, copper, ceramics and plastics.

The NanoCalc Thin Film Reflectometry System allows you to analyze the thickness of optical layers from 1 nm to 250 µm. You can observe a single thickness with a resolution of 0.1 nm and analyze single-layer or multilayer films in less than one second

  • Resolution to 0.1 nm
  • Can measure up to 10 layer stacks
  • Angle of incidence: 90°
  • In-situ & on-line thickness measurements
  • Refractive index measurement
  • sophisticated algorithms for defect and roughness measurements
  • large database to ensure accuracy over a broad range of materials
  • adaptors for complex geometries and accessories for thickness mapping
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  • Transmission and reflection measurements of anti-reflective & hardness coatings
  • Analysing medical coatings and catheter balloon foils
  • Testing hardness and wear coatings
  • Measuring thickness of thinned silicon wafers
  • Determining photo resists for masks
  • Analysing coatings applied for weather or dirt resistance (lotus effect)
  • Measuring coatings inside drinks containers
  • Air gap measurements
  • Optical disk coating analysis (CD, DVD, … )
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NanoCalc-VIS
Wavelenght range400-850 nm
Thickness range50 nm - 20 μm
Optical resolution0.1 nm
Repeatability0.3 nm
NanoCalc-XR
Wavelenght range250-1050 nm
Thickness range10 nm - 100 μm
Optical resolution0.1 nm
Repeatability0.3 nm
NanoCalc-DUV
Wavelenght range190-1100 nm
Thickness range1 nm - 100 μm
Optical resolution0.1 nm
Repeatability0.3 nm
NanoCalc-NIR
Wavelenght range900-1700 nm
Thickness range100 nm - 250 μm
Optical resolution0.1 nm
Repeatability1 nm
Spectroscopic
Angle of incidence 90° or 70°
Number of layersUp to 10
Refractive IndexYes
Test materialsTransparent or semitransparent thin film materials
Reference neededYes, bare substrate
Measurement ModesReflection and transmission
Rough materialsYes
Measurement speed100 ms to 1s
On-line possibilitiesYes
Mechanical tolerance (height)With collimation (COL-UV-6.35)
Spot sizeStandard: 200 μm or 400 μm; optional 100μm on request
Microspot & CCD colourYes, in combination with microscope
 Mapping option6" or 12" xy-scanning stage
Vacuum possibilitiesYes
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