Vacuum Feed Through

/ Accessories

The Ocean Optics VFT Vacuum Feed Through channels light into or out of a vacuum chamber for a variety of ultra-high vacuum applications, including optical monitoring in semiconductor processing and endpoint detection of thin film deposition.

  • Performs well in NEMA Enclosures and in high-pressure applications
  • Vacuum rated to 10-10 Torr
  • Operates up to 350 °C
  • Glass-to-metalized optical fiber improves performance

The VFT’s high- and low-pressure sides are terminated to an SMA 905 Connector and couples easily to optical fibers and Ocean Optics’ extensive line of light sources, miniature fiber optic spectrometers and accessories. The VFT can be screwed into a 3/8-24 external threaded hole in the vacuum chamber, or can be bolted into a smooth hole with the provided nut and washer. Setting up is as simple as attaching an optical fiber to the VFT using a 21-02 Splice Bushing. Optional aluminum-jacketed or armored-cable optical fiber assemblies are recommended for the low-pressure side of the chamber.

Vacuum Feed Throughs are available in optical fiber diameters of 200 µm , 400 µm , 600 µm and 1000 µm diameters. Each VFT includes two 21-02 SMA Splice Bushings — an inline adapter that mates SMA 905 Connectors.

Vacuum Feedthroughs with Standard Flanges.

These VFTs are welded into industry standard flanges for use in vacuum chambers. VFTs are available in four standard flange types: KF40 and KF16 ISO Flanges and 2.75″ and 1.33″ Con-flat Flanges.

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VFT-200-SR 200 µm, solarization-resistance (SR) fiber
VFT-200-VIS 200 µm, VIS-NIR fiber
VFT-400-SR 400 µm, SR fiber
VFT-400-VIS 400 µm, VIS-NIR fiber
VFT-600-SR 600 µm, SR fiber
VFT-600-VIS 600 µm, VIS-NIR fiber
VFT-1000-UV 1000 µm, SR fiber
VFT-1000-VIS 1000 µm, VIS-NIR fiber
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  • Optical monitoring in semiconductor processing
  • Endpoint detection of thin film deposition
  • Plasma monitoring
  • Teaching labs
  • Space pressurized vessels
  • Nuclear plant
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